Date:
Tuesday May 3rd, 2016
Venue:
EPFL, Rolex Learning Center
Program:
- 10 invited speakers
- 200 posters
The posters show the research projects realized during the last 12 months in the EPFL Center of MicroNanoTechnology (CMi).
Abstract:
The scope of the forum is Micro & Nano Fabrication Techniques used in the following fields:
- Micro and Nanoelectronics (Heterogenous Integration, Soft Bioelectronic, Nanowires, High-Q Resonators, 3D Integration, ...)
- Biomedical Applications (Microfluidics, Cells-Manipulation, Microelectrode s, Molecules Detection, BioMicroNanoSystems, ...)
- MEMS, NEMS (Sensors and Actuators, Motors, Tweezers, Micro and Nanomechanics, ...)
- Optics (Optofluidics, Nanophotonics, Optomechanics, MOEMS, ...)
- Nanostructure Physics (III/V Devices, Quantum Opto-Electronics, Nanotubes, Nanowires, Nanomechanics, ...)
- Material Sciences (New Materials, Photovoltaic Materials, Energy Harvesting, Micro Fuel Cells, ...)
- Fabrication Processes (EBEAM Lithography, Dry Etching, Thin Films, Photolithography, CMP, FIB, ALD, Self-Assembly, ...)
- Metrology (Spectroscopic Ellipsometry, FIB, SEM, AFM, Electrical Measurements, ...)
- Packaging and Assembly (Grinding, TSV, PDMS Micromolding, ...
Target public:
More than 600 people attended the previous edition, including :
- professors,
- industrials,
- researchers,
- students.
Final Program and
Registration:
available end of March
The meeting is organized by the EPFL Center of MicroNanoTechnology (CMi)
Information provided by:
Dr. Philippe Flückiger
Director of Operations
http://cmi.epfl.ch/
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